Temperature (°C) | Surface accuracy ZYGO interferometer [RMS wave (633 nm)] | Surface roughness AFM [Ra (nm)] | ||
---|---|---|---|---|
Before | After | Before | After | |
100 | 0.007 | 0.007 | 0.096 | 0.104 |
400 | 0.006 | 0.006 | 0.099 | 0.111 |
600 | 0.006 | 0.006 | 0.105 | 0.127 |
800 | 0.004 | 0.007 | 0.164 | 0.233 |
1000 | 0.010 | 0.009 | 0.322 | 0.225 |