Materials | Use | Remark |
---|---|---|
Fluorene resin, Barium plate steel | Walls and ceiling of clean room | |
Silicon | Caulking agent | |
ADC12, Ni–Cr coating | Grating floor | |
Epoxy resin | Floor paint | |
Soda lime glass | Windows for walls | |
Stainless steel 316L EP, Stainless steel 304 BA w/acid cleaning | N2 and compressed air gas pipe | |
Zinc steel | Local ventilation | |
Boron free ULPA | FFU filters for recycling nitrogen purifiers | CC |
Stainless steel 304 | Clean chambers, vacuum line | CC |
A6061 | Jigs and tools used for handling samples | CC |
Viton | Sealing for sub-chambers and sample containers | CC |
Viton-coated butyl | Gloves for clean chambers | CC |
Gold | References for IR spectrometer, terminals of wires | CC |
PTFE | Electronic insulators, reference material for an optical microscope, jigs | CC |
PFA tube | Pipes for nitrogen gas lines of desiccators | CC |
Oxygen-free copper | Gasket for clean chambers | CC |
Tempered glass | Clean chambers | CC |
Quart glass | Viewports, containers for samples | CC |
Sapphire glass | Viewports, containers for samples | CC |
Nickel–chrome–molybdenum steel | Hex keys | CC |
Kapton film | Covering of clean chambers for insulation during baking | CC3-2 |
Silver solder (Ag, Au, and Zn) | Sampling tool for mm-size grains | CC3-2 |
PEEK | Connectors for power and signal wires, a pair of tweezers for reference weights | CC4-2 |
Nylon tube | Pipes for compressed air | |
Nytril | Gloves | |
Steel plate w/melamine-baking finishing | Cabinets for instruments | |
Aluminum foil | Covering of clean chambers for thermal homogenization during baking | |
Glass fiber | Insulators for baking heaters | |
Acryl resin | Main materials for glove boxes | |
Teflon grease | Used for lubrication in clean rooms | Ulvac Super Z300 |
PVC | Main materials for furniture in acid/alkali cleaning room | |
PE | Plastic bags | |
PP | Cases for tools and consumables | |
Polyester | Clean suits, clean cloths | |
Polyurethane | Wheels of cabinets and wagons, soles of clean boots for workers | |
Non-woven textile | Wipers, hairnets and masks |