Fig. 3

Collimator geometry and size of detector in one HEP module. Upper figure illustrates collimator and stack of silicon strip detectors (SSDs) (one 50-μm-thick detector and three 600-μm-thick detectors). Lower figure marks dimensions of collimator and detector stack of HEP-H. The silicon stack of HEP-H consists of one 50-μm-thick sheet and seven 600-μm-thick sheets. The values of A, B, C, a, b, c, L, R, and d are listed in the table at the upper right area of the figure. When not otherwise noted, the manufacturing tolerance is 0.1 mm. HEP-L and HEP-H collimators consist of stacked thin Al plates with square holes, and their dimensions are listed in the lower right table