Table 1 Spatial resolution of DSM-LaRI and SEM
Method | Spatial resolution \(\left( {{{\upmu {\text{m}}} \mathord{\left/ {\vphantom {{\upmu {\text{m}}} {{\text{pixel}}}}} \right. \kern-\nulldelimiterspace} {{\text{pixel}}}}} \right)\) |
|---|---|
DSM-LRI 20× | 9.5 |
SEM 1× (08_07) | 28.2 |
SEM 1× (08_18) | 16.6 |
SEM 1× (10_26) | 12.0 |
SEM 1× (06_40) | 21.7 |
SEM 40× | 2.32 |
SEM 100× | 0.934 |
SEM 500× | 0.185 |