Fig. 11
From: Scanning SQUID microscope system for geological samples: system integration and initial evaluation
a Experimental setup for laser interferometry measurement of the XYZ stage positioning. b Results of laser interferometry. X-axis stepping motor was fixed, and the Y-axis stepping motor was moved in 1-mm steps according to the software. Blue solid (open) circles plot the difference between the XYZ stage position setting and the position measured with laser interferometry in +Y direction for the first (second) measurement, and the red solid (open) circles are for the −Y direction measurements